NanoCalc Thin Film Reflectometry System

The optical properties of thin films arise from reflection and interference. The NanoCalc Thin Film Reflectometry System allows you to analyze the thickness of optical layers from 10 nm to ~250 µm.. You can observe a single thickness with a resolution of 0.1 nm. Depending on your software choice, you can analyze single-layer or multilayer films in less than one second and can measure the thickness and removal rates of semiconductor process films or anti-scratch coatings, hard coatings and anti-reflection coatings.

Features

Theory of Operation

The two most common ways to measure thin film characteristics are spectral reflectance/transmission and ellipsometry. NanoCalc utilizes the reflectance method and measures the amount of light reflected from a thin film over a range of wavelengths, with the incident light normal to the sample surface.

Search by n and k

As many as three layers can be specified in a film stack. The various films and substrate materials can be metallic, dielectric, amorphous or crystalline semiconductors. The NanoCalc Software includes a large library of n and k values for the most common materials. You can edit and add to this library. Also, you can define material types by equation or dispersion formulas.

Applications

NanoCalc Thin Film Reflectometry Systems are ideal for in situ, on-line thickness measurements and removal rate applications, and can be used to measure the thickness of oxides, SiNx, photoresist and other semiconductor process films. NanoCalc Systems measure anti-reflection coatings, anti-scratch coatings and rough layers on substrates such as steel, aluminum, brass, copper, ceramics and plastics.

NanoCalc Systems

NC-UV-VIS-NIR
Wavelength:	250-1100 nm
Thickness:	10 nm-70 µm
Light source:	Deuterium and Tungsten Halogen
Price:	$18399

NC-UV-VIS
Wavelength:	250-850 nm
Thickness:	10 nm-20 µm
Light source:	Deuterium and Tungsten Halogen
Price:	$14151

NC-VIS-NIR
Wavelength:	400-1100 nm
Thickness:	20 nm-100 µm (optional 1 µm-250 µm)
Light source:	Tungsten Halogen
Price:	$16952

NC-VIS
Wavelength:	400-850 nm
Thickness:	50 nm-20 µm
Light source:	Tungsten Halogen
Price:	$12781

NC-NIR
Wavelength:	650-1100 nm
Thickness:	70 nm-70 µm
Light source:	Tungsten Halogen
Price:	$12781

NC-NIR-HR
Wavelength:	650-1100 nm
Thickness:	70 nm-70 µm
Light source:	Tungsten Halogen
Price:	$18087

NC-512-NIR
Wavelength:	900-1700 nm
Thickness:	50 nm-200 µm
Light source:	High-power Tungsten Halogen
Price:	$42472

NanoCalc Specifications

Angle of incidence:	90°
Number of layers:	3 or fewer
Reference measurement needed:	Yes (bare substrate)
Transparent materials:	Yes
Transmission mode:	Yes
Rough materials:	Yes
Measurement speed:	100 milliseconds to 1 second
On-line possibilities:	Yes
Mechanical tolerance (height):	With new reference or collimation (74-UV)
Mechanical tolerance (angle):	Yes, with new reference
Microspot option:	Yes, with microscope
Vision option:	Yes, with microscope
Mapping option:	6" and 12" XYZ mapping tables
Vacuum possibilities:	Yes